metrology相关论文
As smaller structures are being increasingly adopted in the semiconductor industry, the performance of memory and logic ......
Scanning probe microscopy (SPM) had been recognized as an imaging technology with an atomic resolution since scanning tu......
Advanced semiconductor optical amplifiers (SOA) and superluminescence diodes (SLD) for fiber sensing
Advanced semiconductor optical amplifiers (SOAs) with fast switching speeds, high extinction ratio, high gain and high s......
Model eyes with curved multilayer structure for the axial resolution evaluation of an ophthalmic opt
Optical coherence tomography (OCT) has been widely applied to the diagnosis of eye diseases during the past two decades.......
介绍了太赫兹脉冲技术在宽带示波器计量校准方面的应用。首先介绍了宽带示波器上升时间和带宽的校准原理,然后介绍基于光电技术的......
Human beings have witnessed unprecedented developments since the 1760s using precision tools and manufacturing methods t......
针对NTN技术的脉冲波形参数国家基准已无法完全满足目前超高速电脉冲波形测量和校准的现状,构建了基于电光采样技术的脉冲波形参数......
量块支撑与安装方式对坐标测量机尺寸测量示值误差的影响已经越来越引起重视，尤其对于线性测量精度为0.6 μm 1000/L以上的计量型坐......
Numerical simulation of isopachic parameter determined by phase-stepping interferometric photoelasti
A phase-stepping interferometric photoelasticity method is proposed to determine whole-filed sum of principal stresses. ......
介绍了辐射源尺寸效应(SSE)的定义、测量方法和原理及精密辐射温度计的测温原理。通过直接法和间接法测量标准辐射温度计RT9032和......
为了测量87Sr原子光晶格钟的钟激光频率和控制红冷却激光及光晶格激光的绝对频率，实验建立了一套掺铒光纤光学频率梳系统，并将其锁定......
Benzene Monitoring and S-Phenylmercapturic Acid Determination of Workers at Oil Sites in Congo-Brazz
The toxicity of benzene is well known, and its leukemia effect has established. It is a natural constituent of crude oil......
Super-sensitivity measurement of tiny Doppler frequency shifts based on parametric amplification and
The precision measurement of Doppler frequency shifts is of great significance for improving the precision of speed meas......
Todays best clocks rely on narrowband optical transitions and use a frequency comb as clockwork....
The paper will describe an automated subaperture stitching interferometry for large plano surface based on relevant ......
At the NIM a cylindrical cavity ionization chamber has been establishes as primary standard to measure air kerma for......
针对NTN技术的脉冲波形参数国家基准已无法完全满足目前超高速电脉冲波形测量和校准的现状,构建了基于电光采样技术的脉冲波形参数......
Target dynamics are assumed to be known in measuring digital speckle displacement. Use is made of a simple measurement e......
The 5th Asia Pacific Laser Symposium (APLS2006), sponsored by Shanghai Institute of Optics and Fine Mechanics, Chinese A......
化学机械抛光测量技术和测量技术随着其工艺重要性的日益提高越来越成熟。测量技术在所有类型的化学机械抛光工艺流程控制中扮演了......
We report a passively mode-locked high repetition rate erbium-doped femtosecond fiber laser via nonlinear polarization r......
Laser tracking system(LTS)is an advanced device for large size 3D coordinates measuring with the advantages of broad ran......
For thick resist implant layers,such as a high voltage P well and a deep N well,systematic and uncor-rectable overlay re......
Challenges in Atomic-Scale Characterization of High-k Dielectrics and Metal Gate Electrodes for Adva
The decreasing feature sizes in complementary metal-oxide semiconductor (CMOS) transistor technology will require the re......
Ultrafast optoelectronic technology has been widely used in terahertz time domain spectrum,terahertz imaging technology,......
To improve the frequency stabilization of laser diode in the laser frequency scanned interferometric metrology, a modifi......
The technique of terahertz pulses generated from the photoconductive switches has been applied in the ultrafast electric......
Statistical key variable analysis and model-based control for improvement performance in a deep reac
This paper proposes to develop a data-driven via’s depth estimator of the deep reactive ion etching process based on st......
A slow light structure Mach-Zehnder fiber interferometer is theoretically demonstrated. The sensitivity of the interfero......
We propose a Q-switched Er-doped fiber laser(EDFL) with a threshold pumping power as low as 7.4 mW, and demonstrate usin......
With the support by the National Natural Science Foundation of China and the National Basic Research Program(973)of Chin......
Targets have been developed to measure supersonic radiation transport in aerogel foams using absorption spectroscopy.The......
InP integrated photonics has become a critical enabler for modern telecommunications, and is poised to revolutionize dat......
分析了国际计量局组织的137 Cs空气比释动能关键比对(BIPM RI(Ⅰ)-K5)基准的几何参数、修正因子以及修正因子的确定方法,对我国137......
MEMS轮廓检验在实质上通常都是三维的,而所荻取的3D点云数据常常没有被充分利用.这种次优化的应用也正是由3D数据和3D模型的比对过......
基于结构光扫描测量原理,研究髋骨空间几何形貌的测量方法和技术,经过光条扫描、数据采集、数字建模等过程,建立髋骨的精密数学模......
介绍了用于混凝上结构工程质量检测和工程验收的基于电磁学原理的钢筋保护层厚度测量(仪)法,分析了该类测量仪器地不同和所依据的......
在微电子生产进入深亚微米和纳米技术之后,空白硅晶圆材料正在承担起前所未有的角色来协助解决生产工艺和产品成本等关键问题.根据......
Uncertainty Calculation of Roundness Assessment by Automatic Differentiation in Coordinate Metrology
Recently,Coordinate Measuring Machines(CMMs)are widely used to measure roundness errors.Roundness is calculated from a l......
Development in industry is asking for improved resolution and higher accuracy in dimensional metrology. In this paper,we......
The measurement of boreholes with diameters smaller than 500 μm is a demanding task that cannot be performed using stat......
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Lightning Protective Devices Testing Center affiliated to Shanghai Lightning Protection Center(hereinafter referred to a......
We study a scheme for Mach-Zehnder(MZ) interferometer as a quantum linear device by injecting two-mode squeezed input st......
Unbroken chain of traceability is currently unsettled issues for developing national/ international nanometer scale metr......
Phase estimation of phase shifts in two arms for an SU(1,1) interferometer with coherent and squeeze
We theoretically study the quantum Fisher information(QFI) of the SU(1,1) interferometer with phase shifts in two arms b......
With squeezed states or entangled states being the source, quantum metrology, imaging and sensing can break the standard......
Quantum beats can be produced in fourth-order interference such as in a Hong–Ou–Mandel(HOM) interferometer by using ph......
